- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/66 - Testing or measuring during manufacture or treatment
Patent holdings for IPC class H01L 21/66
Total number of patents in this class: 12362
10-year publication summary
|
1052
|
1002
|
1136
|
1157
|
1148
|
1130
|
985
|
1005
|
957
|
298
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
932 |
| KLA-Tencor Corporation | 2574 |
734 |
| Applied Materials, Inc. | 16587 |
600 |
| Tokyo Electron Limited | 11599 |
553 |
| Samsung Electronics Co., Ltd. | 131630 |
422 |
| KLA Corporation | 1223 |
263 |
| Hitachi High-Technologies Corporation | 2034 |
259 |
| International Business Machines Corporation | 60644 |
193 |
| Changxin Memory Technologies, Inc. | 4732 |
186 |
| Hitachi High-Tech Corporation | 4424 |
185 |
| Lam Research Corporation | 4775 |
177 |
| ASML Netherlands B.V. | 6816 |
161 |
| Micron Technology, Inc. | 24960 |
154 |
| Renesas Electronics Corporation | 6305 |
143 |
| Shin-Etsu Handotai Co., Ltd. | 1277 |
142 |
| Texas Instruments Incorporated | 19376 |
138 |
| Infineon Technologies AG | 8189 |
130 |
| Boe Technology Group Co., Ltd. | 35384 |
121 |
| Kioxia Corporation | 9847 |
118 |
| Samsung Display Co., Ltd. | 30585 |
116 |
| Other owners | 6635 |